SR-excited process

Teraoka, Yuden

Nano Tekunoroji Daijiten, p.340 - 351, 2003/12

The current status of microprocesses using synchrotron radiation in Japan was reviewed. The SR-excited process is followed by SR-excited surface modification, SR-excited crystal growth and SR-excited etching. The SR-excited surface modification is followed by SR-gas-excited surface modification and SR-direct-excited surface modification. The SR-excited crystal growth is followed by SR-excited atomic layer epitaxy and SR-excited chemical vapor deposition. THe SR-excited etching is followed by SR-direct-excited etching, SR-gas-excited etching and SR ablation.

Current status of automated radiation monitoring systems

Hoken Butsuri, 15(4), p.269 - 276, 1980/00

https://doi.org/10.5453/jhps.15.269

no abstracts in English